Conference
Electron cyclotron resonance plasma enhanced chemical vapour deposition (ECR-PECVD): A versatile tool in the fabrication of optoelectronic devices
Authors
Mascher P; Wojcik J
Editors
Deen MJ; Misra D; Ruzyllo J
Series
ELECTROCHEMICAL SOCIETY SERIES
Volume
2002
Pagination
pp. 3-22
Publisher
ELECTROCHEMICAL SOCIETY INC
Publication Date
January 1, 2002
ISBN-10
1-56677-370-9
Name of conference
1st International Symposium on Integrated Electronics
Conference place
PHILADELPHIA, PA
Conference start date
May 12, 2002
Conference end date
May 17, 2002
Conference proceedings
INTEGRATED OPTOELECTRONICS, PROCEEDINGS
Issue
4