The impact of deposition parameters on the optical and compositional properties of Er doped SRSO thin films deposited by ECR-PECVD Conferences

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authors

Flynn, M
Wojcik, J
Gujrathi, S
Irving, E
Mascher, Peter

status

published

publication date

January 1, 2005

published in

Materials Research Society Symposium - Proceedings Journal

presented at event

Symposium on Advanced Devices and Materials for Laser Remote Sensing held at the 2005 MRS Spring Meeting Conference