Conference
Combined Super-STEM imaging, EEL and PL spectroscopy of un-doped and Er doped SRSO on Si
Abstract
We present a combined analysis of Scanning Transmission Electron Microscopy (STEM) imaging and Electron Energy Loss spectroscopy (EELs) of silicon-rich-silicon-oxide (SRSO) thin film on silicon, grown by Plasma Enhanced Chemical Vapour Deposition (PECVD). For un-doped samples, strong room temperature luminescence at ~1.6eV (780nm) is observed, which we ascribe, by way of plasmon intensity mapping and ‘chemical fingerprinting’ to phase …
Authors
Crowe IF; Roschuk T; Bangert U; Sherlikcr B; Halsall MP; Knights A; Mascher P
Pagination
pp. 163-165
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date
July 1, 2008
DOI
10.1109/commad.2008.4802117
Name of conference
2008 Conference on Optoelectronic and Microelectronic Materials and Devices