Investigation of ion-bombardment effects on the formation of voids during deposition of a-Ge:H Conferences

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authors

Peng, ZL
Comedi, D
Dondeo, F
Chambouleyron, I
Simpson, PJ
Mascher, Peter

status

published

publication date

December 1999

has subject area

0204 Condensed Matter Physics (FoR)
0206 Quantum Physics (FoR)
0303 Macromolecular and Materials Chemistry (FoR)
General Physics (Science Metrix)

published in

Physica B: Condensed Matter Journal

presented at event

20th International Conference on Defects in Semiconductors (ICDS-20) Conference