Characterization of silicon oxynitride films using ion beam analysis techniques Academic Article uri icon

  •  
  • Overview
  •  
  • Research
  •  
  • Identity
  •  
  • Additional Document Info
  •  
  • View All
  •  

authors

  • Walker, SR
  • Davies, JA
  • Mascher, Peter
  • Wallace, SG
  • Lennard, WN
  • Massoumi, GR
  • Elliman, RG
  • Ophel, TR
  • Timmers, H

publication date

  • October 2000