A comparative study of vacancies produced by proton implantation of silicon using positron annihilation and deep level transient spectroscopy
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status
publication date
- April 2001
has subject area
- 0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics (FoR)
- 0402 Geochemistry (FoR)
- 0915 Interdisciplinary Engineering (FoR)
- Applied Physics (Science Metrix)