Hydrogen and Nitrogen Loss during ERD Analysis of Siliicon (Oxy)nitrides Conferences

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authors

Wallace, SG
Kockelkoren, AC
Boudreau, MG
Mascher, Peter
Forster, JS
Davies, JA

publication date

January 1, 1997

has subject area

0306 Physical Chemistry (incl. Structural) (FoR)
0912 Materials Engineering (FoR)
Materials (Science Metrix)
Nanoscience & Nanotechnology (Science Metrix)

published in

Materials Science Forum Journal

presented at event

International Symposium on Materials Science Applications of Ion Beam Techniques / 1st German/Australian Workshop on Ion Beam Analysis Conference