Conference
Optical emission spectroscopy as a process monitor for triod ion plating with TiN
Authors
Boumerzoug M; Mascher P; Nagy DR
Volume
1594
Pagination
pp. 401-410
Publisher
SPIE, the international society for optics and photonics
Publication Date
January 1, 1992
DOI
10.1117/12.56653
Name of conference
Process Module Metrology, Control and Clustering
Conference proceedings
Proceedings of SPIE--the International Society for Optical Engineering
ISSN
0277-786X