<title>Optical emission spectroscopy as a process monitor for triod ion plating with TiN</title> Conferences

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authors

Boumerzoug, Mohamed
Mascher, Peter
Nagy, Douglas R

status

published

publication date

January 1, 1992

published in

Proceedings of SPIE - The International Society for Optical Engineering Journal

presented at event

Process Module Metrology, Control and Clustering Conference