Conference
In-situ monitoring of DC saddle-field plasma-assisted deposition of amorphous silicon and silicon nitride
Authors
Kruzelecky RV; Boumerzoug M; Mascher P; Harry M; Zukotynski S
Volume
1594
Pagination
pp. 133-145
Publisher
SPIE, the international society for optics and photonics
Publication Date
January 1, 1992
DOI
10.1117/12.56628
Name of conference
Process Module Metrology, Control and Clustering
Conference proceedings
Proceedings of SPIE--the International Society for Optical Engineering
ISSN
0277-786X