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Silicon nanocrystal formation in silicon-rich...
Conference

Silicon nanocrystal formation in silicon-rich silicon oxide thin films

Authors

Roschuk TR; Wojcik J; Irving EA; Flynn M; Mascher P

Volume

5577

Pagination

pp. 450-458

Publisher

SPIE, the international society for optics and photonics

Publication Date

December 20, 2004

DOI

10.1117/12.567458

Name of conference

Photonics North 2004: Optical Components and Devices

Conference proceedings

Proceedings of SPIE--the International Society for Optical Engineering

ISSN

0277-786X