Conference
Gas and Heat Treatment Effects on the Defect Structure of a-SiC:H Films
Authors
Friessnegg T; Boudreau M; Mascher P; Simpson PJ; Puff W
Volume
258-263
Pagination
pp. 709-714
Publisher
Trans Tech Publications
Publication Date
December 11, 1997
DOI
10.4028/www.scientific.net/msf.258-263.709
Conference proceedings
Materials Science Forum
ISSN
0255-5476