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Defect Characterization of InAs Wafers using...
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Defect Characterization of InAs Wafers using Positron Lifetime Spectroscopy

Abstract

Positron lifetime measurements on InAs wafers have shown that the positron bulk lifetime in InAs is 246±2 ps. Most samples exhibit a defect lifetime of 287±6 ps, which is attributable to monovacancy-impurity complexes with a concentration of 7±2×10 16 cm-3. Very heavily doped n-type samples exhibit a defect lifetime of 332–340 ps, characteristic of divacancies. The concentration of these defects is also close to 1017 cm-3. Both types of defects …

Authors

Mahony J; Mascher P

Volume

442

Pagination

pp. 547-552

Publisher

Springer Nature

Publication Date

December 1996

DOI

10.1557/proc-442-547

Conference proceedings

MRS Advances

Issue

1

ISSN

2731-5894