Compositional and optical characterization of SiO/sub x/ films deposited by ECR-PECVD for photonics applications Conferences

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authors

Mascher, Peter
Flynn, M
Irving, E
Roschuk, T
Wojcik, J
Mascher, R

status

accepted

publication date

January 1, 2004

published in

2004 10th International Workshop on Computational Electronics (IEEE Cat. No.04EX915) Journal

presented at event

2004 1st IEEE International Conference on Group IV Photonics Conference