Microgripper for handling and assembly in MEMS produced by SU-8 technology Conferences uri icon

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authors

  • Petrovic, Dragan
  • Popovic, Gordana
  • Petrovic, Tatjana
  • Schneider, Andreas
  • Huq, Ejaz
  • Detter, Helmut
  • Franek, Frantisek

publication date

  • September 10, 2002