SPECTROSCOPIC ELLIPSOMETRY CHARACTERIZATION OF THIN-FILM POLYSILICON Conferences

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authors

LYNCH, S
SPINELLI, L
Sherlock, Mary
BARRETT, J
CREAN, GM

status

published

publication date

January 1, 1994

published in

Materials Research Society Symposium - Proceedings Journal

presented at event

Symposium on Diagnostic Techniques for Semiconductor Materials Processing, held as part of the 1993 Fall Meeting of the Materials-Research-Society Conference