Conference
SPECTROSCOPIC ELLIPSOMETRY CHARACTERIZATION OF THIN-FILM POLYSILICON
Authors
LYNCH S; SPINELLI L; SHERLOCK M; BARRETT J; CREAN GM
Editors
Glembocki OJ; Pang SW; Pollak FH; Crean GM; Larrabee G
Series
MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS
Volume
324
Pagination
pp. 39-45
Publisher
MATERIALS RESEARCH SOC
Publication Date
January 1, 1994
ISBN-10
1-55899-223-5
Name of conference
Symposium on Diagnostic Techniques for Semiconductor Materials Processing, held as part of the 1993 Fall Meeting of the Materials-Research-Society
Conference place
BOSTON, MA
Conference start date
November 29, 1993
Conference end date
December 2, 1993
Conference proceedings
DIAGNOSTIC TECHNIQUES FOR SEMICONDUCTOR MATERIALS PROCESSING
ISSN
0272-9172