Scattering of light keV ions from amorphous and crystalline solid surfaces

Total reflection coefficients (R), backscattered energy fractions (γ), and backscattered energy spectra are evaluated using a binary collision Monte Carlo technique for a variety of light ions (H, D, T, He) in the energy range 0.25–8 keV, incident on amorphous targets (C, Fe, Nb). The scattering is also evaluated for H on Nb for a range of incident angles and two electronic stopping values. The average scattered energy per reflected particle and the backscattered energy spectra are found to vary in a universal manner as a function of the reflection coefficient between the Rutherford high energy limit and a low energy multiple collision limit. Single crystal effects are also briefly discussed using a diffusional dechanneling model.