Application of an extended linear cascade model to the sputtering of Ag, Au, and Pt by heavy atomic and molecular ions

Sputtering yields of Ag, Au, and Pt have been measured for monatomic and polyatomic ions of P, As, Sb, and Bi over the energy range 10–250 keV. It is shown that the energy dependence of the sputter yield follows the energy dependence of the surface deposited energy FD(0) when the calculated FD(0) values are obtained from a Monte-Carlo simulation. Using the Monte-Carlo values, the observed sputtering yield is found to obey the linear model of …