Laser micromachining of arbitrarily complex and overhang-free SiN nanomechanical resonators

Research on silicon nitride (SiN) nanomechanical resonators produces an exceptionally rich variety of resonator geometries, for which there is currently no available rapid prototyping solution. Experimental advances in nanobeam, trampoline, phononic bandgap, and soft-clamping structures all rely on conventional nanofabrication involving e-beam or photolithography, followed by various etching steps. These techniques are typically time-consuming, …