High detectivity terahertz radiation sensing using frequency-noise-optimized nanomechanical resonators

We achieve high detectivity terahertz radiation sensing using a silicon nitride nanomechanical resonator functionalized with a metasurface absorber. High performances are achieved by striking a balance between the frequency stability of the resonator and its responsivity to absorbed radiation. Using this approach, we demonstrate a detectivity D*≈3.4×109cm⋅Hz/W and a noise equivalent power NEP≈36pW/Hz that outperform the best room-temperature …