One-Step Fabrication of 2.5D CuMoOx Interdigital Microelectrodes Using Numerically Controlled Electric Discharge Machining for Coplanar Micro-Supercapacitors

With the increasing market demands for wearable and portable electronic devices, binary metal oxides (BMOs) with a remarkable capacity and good structure stability have been considered as a promising candidate for fabricating coplanar micro-supercapacitors (CMSCs), serving as the power source. However, the current fabrication methods for BMO microelectrodes are complex, which greatly hinder their further development and application in BMO …