On-chip hybrid erbium-doped tellurium oxide-silicon nitride distributed Bragg reflector lasers

We demonstrate integrated on-chip erbium-doped tellurite (TeO₂:Er³⁺) waveguide lasers fabricated on a wafer-scale silicon nitride platform. A 0.352-µm-thick TeO₂:Er³⁺ coating was deposited as an active medium on 0.2-µm-thick, 1.2- and 1.6-µm-wide, and 22-mm-long silicon nitride waveguides with sidewall-patterned asymmetrical distributed Bragg reflector cavities. The lasers yield efficiencies between 0.06 and 0.36%, lasing threshold ranging from …