Chapter
Probing Material Interfaces in Nanowire Devices Using Capacitive Measurements
Abstract
Semiconductor devices are systems composed of multiple materials, and their functionality depends on the junctions and interfaces between these materials. In this chapter, I demonstrate a method to study junctions and interfaces in one-dimensional nanoscale semiconductor materials. Examined are insulator interface and dopant profile in vapor-liquid-solid (VLS) -grown silicon nanowires, the electronic properties of the native surface of InAs …
Authors
Tseng Y-C
Book title
Nanowire Electronics
Series
Nanostructure Science and Technology
Pagination
pp. 83-110
Publisher
Springer Nature
Publication Date
2019
DOI
10.1007/978-981-13-2367-6_4