New Insights into Sequential Infiltration Synthesis

Sequential infiltration synthesis (SIS) is a process derived from ALD in which a polymer is infused with inorganic material using sequential, self-limiting exposures to gaseous precursors. During the initial SIS cycles, the organometallic precursor (e.g. trimethyl aluminum, TMA) reacts preferentially with specific functional groups within the polymer, while in later cycles growth occurs in an ALD-like fashion on the inorganic “seeds” that have …