Preprint
High Q-Factor Silicon Nitride Nanomechanical Resonators Fabricated by Maskless Femtosecond Laser Micro-machining
Abstract
Freestanding Silicon nitride (SiN) devices are central to the field of
nanomechanical resonators and for other technology applications such as
Authors
Nikbakht R; Xie X; Weck A; St-Gelais R
Publication date
October 1, 2022
DOI
10.48550/arxiv.2210.00290
Preprint server
arXiv