Mesure de module d’Young d’un film mince à partir de mesures expérimentales de nanoindentation réalisées sur des systèmes multicouches

The nanoindentation technique is suitable for the characterization of the mechanical properties of thin films. However, for layers of a few hundred nanometers thick, the substrates as well as the underlying layers are mechanically involved and the measures are not connected in a simple manner to the properties of the thin film. The purpose of this study is to present an extension of the simple analytical model of Bec et al. in the case of a …