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Formation of Si-nanocrystals in SiO2 via Ion...
Journal article

Formation of Si-nanocrystals in SiO2 via Ion Implantation and Rapid Thermal Processing

Authors

Knights A; Crowe I; Sherliker B; Halsall M; Gwilliam R; Coleman P

Journal

ECS Meeting Abstracts, Vol. MA2009-01, No. 17, pp. 747–747

Publisher

The Electrochemical Society

Publication Date

May 1, 2009

DOI

10.1149/ma2009-01/17/747

ISSN

2151-2043