Laser machining of free-standing silicon nitride membranes

Patterning free-standing Silicon Nitride membranes has enabled the development of various SiN-based devices such as quantum resonators, biosensors, temperature detectors, and plasmonic devices. Patterning SiN membranes usually involves expensive and time-consuming cleanroom techniques that limit flexibility in the development of new SiN membrane designs. While ultrafast laser machining has been proposed to create micron to submicron features in …