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Effects of different processing parameters on...
Journal article

Effects of different processing parameters on laser water jet-machining silicon

Abstract

Laser water jet processing is a new hybrid method developed on the basis of traditional laser processing technology. It combines high laser processing efficiency with the impact and cooling effects of water jets. Laser water jet processing can effectively process hard and brittle materials such as silicon. In-depth study of the processing technology has important practical significance. For this reason, the controlled variable method is used to …

Authors

Chen Y; Li X; Chen X; Li H

Journal

Thermophysics and Aeromechanics, Vol. 29, No. 6, pp. 929–939

Publisher

Pleiades Publishing

Publication Date

November 1, 2022

DOI

10.1134/s0869864322060130

ISSN

0869-8643

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