Journal article
Photoluminescence from Si+ Ion Implanted Silicon Nitride Films Deposited via PECVD
Authors
Anstey JT; Knights A; Mascher P
Journal
ECS Meeting Abstracts, Vol. MA2010-01, No. 20, pp. 1081–1081
Publisher
The Electrochemical Society
Publication Date
February 5, 2010
DOI
10.1149/ma2010-01/20/1081
ISSN
2151-2043