Remote Actuation of Silicon Nitride Nanomechanical Resonators Using On-Chip Substrate Capacitors

Mechanical actuation of high mechanical quality (Q) factor silicon nitride (SiN) resonators often imposes a tradeoff between integration and performance. Fully integrated electrical actuation is possible, but typically require modification of the resonators to include electrodes that can increase material damping and reduce Q-factors. Conversely, remote actuation using piezo ceramics or optical forces is bulky and typically suitable only in …