Nitrogen sorption on titanium: Reconstruction of the subsurface composition profile using low- and high-energy Auger data

Although Auger electron spectroscopy (AES) is the most widely used technique for surface analysis, there are many problems associated with its application to TiN, a technologically important material. The N and high-energy Ti peaks overlap completely and there is no elemental N standard available at ambient temperature. TiN standards can be used and the overlap problem can be overcome by computer simulation of the high-energy spectrum. …