Spatially Resolved Spectro-Electrochemistry Using Soft X-Ray Scanning Transmission X-Ray Microscopy

We are using soft X-ray scanning transmission X-ray microscopy (STXM) [1] at CLS beamline 10ID1 (SM) and at ALS beamline 5.3.2.2 to investigate Cu deposition onto, and stripping from a Au surface. Electrochemical reduction of Cu(II) under acid conditions is a commonly used process to deposit copper for integrated circuit interconnects. The reduction of Cu(II) to Cu(0) proceeds via a Cu(I) intermediate, which can be detected under neutral or …