Journal article
Hybrid Sublimation ECR-PECVD System for Fabrication of Rare Earth Doped Silicon Based Thin Film Structures
Authors
Dabkowski R; Wojcik J; Mascher P
Journal
ECS Meeting Abstracts, Vol. MA2012-02, No. 39, pp. 2947–2947
Publisher
The Electrochemical Society
Publication Date
June 4, 2012
DOI
10.1149/ma2012-02/39/2947
ISSN
2151-2043