Journal article
(Invited) Low-Temperature Spatially-Resolved Luminescence Spectroscopy of Microstructures with Strained III-V Quantum Wells
Abstract
The continuous development of advanced photonic devices based on 3-dimensional structuring of active materials calls for more efforts on characterization techniques. This statement applies, in particular, to processes, such as dry etching applied to III-V semiconductors. Dry (or plasma-based) etching is frequently used within nanofabrication platforms to realize semiconductor lasers, ridge waveguides, photonic integrated circuits, etc. …
Authors
Landesman J-P; Goktas NI; LaPierre R; Ghanad-Tavakoli S; Pargon E; Petit-Etienne C; Levallois C; Jiménez J; Dadgostar S
Journal
ECS Meeting Abstracts, Vol. MA2022-01, No. 20, pp. 1090–1090
Publisher
The Electrochemical Society
Publication Date
July 7, 2022
DOI
10.1149/ma2022-01201090mtgabs
ISSN
2151-2043