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Oxygen-Dependent Cerium Photoluminescence in LPCVD...
Journal article

Oxygen-Dependent Cerium Photoluminescence in LPCVD Si3N4

Authors

Savidge RM; Anstey J; Stevanovic DV; Kleiman RN; Knights AP

Journal

ECS Meeting Abstracts, Vol. MA2012-01, No. 18, pp. 826–826

Publisher

The Electrochemical Society

Publication Date

February 15, 2012

DOI

10.1149/ma2012-01/18/826

ISSN

2151-2043