Journal article
Characterization of Phase Transformation by Fe-SEM and Fe-TEM Analysis
Abstract
Abstract The formation of a silicon alloy has been achieved by electron beam irradiation of a nickel-silicon bilayer. This process, called SiDWEL1, has been developed by Quantiscript. The nickel-silicon bilayer is very thin and the electron beam operates at low energy and current. Silicide formation occurred around the interaction volume of the electrons within the material. This paper describes the nature of the structures produced and the …
Authors
Horny P; Drouin D; Gauvin R; Botton GA
Journal
Microscopy and Microanalysis, Vol. 7, No. S2, pp. 490–491
Publisher
Oxford University Press (OUP)
Publication Date
August 1, 2001
DOI
10.1017/s143192760002852x
ISSN
1431-9276