Journal article
Surface nanostructuring of CuIn1−x Ga x Se2 films using argon plasma treatment
Abstract
In this work we report a phenomenon of the self-formation of nanostructure arrays during low-energy inductively coupled argon plasma treatment of the surface of copper indium gallium diselenide films grown by different methods on glass substrates. Selenization, pulsed laser deposition and multistage co-evaporation technological methods were used for the growth of polycrystalline CuIn1−x Ga x Se2 (0.04 ≤ x ≤ 0.45) films. The plasma treatment of …
Authors
Zimin SP; Gorlachev ES; Mokrov DA; Amirov II; Naumov VV; Gremenok VF; Juskenas R; Skapas M; Kim WY; Bente K
Journal
Semiconductor Science and Technology, Vol. 32, No. 7,
Publisher
IOP Publishing
Publication Date
July 1, 2017
DOI
10.1088/1361-6641/aa6fd9
ISSN
0268-1242