Journal article
Metamaterial-Engineered Silicon Beam Splitter Fabricated with Deep UV Immersion Lithography
Abstract
Subwavelength grating (SWG) metamaterials have garnered a great interest for their singular capability to shape the material properties and the propagation of light, allowing the realization of devices with unprecedented performance. However, practical SWG implementations are limited by fabrication constraints, such as minimum feature size, that restrict the available design space or compromise compatibility with high-volume fabrication …
Authors
Vakarin V; Melati D; Dinh TTD; Le Roux X; Kan WKK; Dupré C; Szelag B; Monfray S; Boeuf F; Cheben P
Journal
Nanomaterials, Vol. 11, No. 11,
Publisher
MDPI
DOI
10.3390/nano11112949
ISSN
2079-4991