Journal article
Defect Distribution across 6-Inch CZ-Silicon Wafers
Authors
Puff W; Mascher P; Hahn SK; Cho KH; Lee BY
Journal
Materials Science Forum, Vol. 105-110, , pp. 1185–1188
Publisher
Trans Tech Publications
Publication Date
January 1, 1992
DOI
10.4028/www.scientific.net/msf.105-110.1185
ISSN
0255-5476