Journal article
Effects of Boron Doping on the Annealing Characteristics of Cz-Silicon
Authors
Puff W; Mascher P; Kerr D; Dannefaer S
Journal
Materials Science Forum, Vol. 38-41, , pp. 225–230
Publisher
Trans Tech Publications
Publication Date
January 1, 1991
DOI
10.4028/www.scientific.net/msf.38-41.225
ISSN
0255-5476