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Optical actuation of a micromechanical photodiode...
Journal article

Optical actuation of a micromechanical photodiode via the photovoltaic-piezoelectric effect

Abstract

Radiation pressure and photothermal forces have been previously used to optically actuate micro/nanomechanical structures fabricated from semiconductor piezoelectric materials such as gallium arsenide (GaAs). In these materials, coupling of the photovoltaic and piezoelectric properties has not been fully explored and leads to a new type of optical actuation that we call the photovoltaic-piezoelectric effect (PVPZ). We demonstrate this effect by …

Authors

Rampal A; Kleiman RN

Journal

Microsystems & Nanoengineering, Vol. 7, No. 1,

Publisher

Springer Nature

DOI

10.1038/s41378-021-00249-y

ISSN

2096-1030

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