Journal article
Optical actuation of a micromechanical photodiode via the photovoltaic-piezoelectric effect
Abstract
Radiation pressure and photothermal forces have been previously used to optically actuate micro/nanomechanical structures fabricated from semiconductor piezoelectric materials such as gallium arsenide (GaAs). In these materials, coupling of the photovoltaic and piezoelectric properties has not been fully explored and leads to a new type of optical actuation that we call the photovoltaic-piezoelectric effect (PVPZ). We demonstrate this effect by …
Authors
Rampal A; Kleiman RN
Journal
Microsystems & Nanoengineering, Vol. 7, No. 1,
Publisher
Springer Nature
DOI
10.1038/s41378-021-00249-y
ISSN
2096-1030