Journal article
Atomic scale annealing effects on InxGa1-xNyAs1-y studied by TEM three-beam imaging
Abstract
A transmission electron microscopy (TEM) method for simultaneous measurement of indium and nitrogen content in InGaNAs at atomic scale is introduced, tested, and applied to investigate thermal annealing effects on structural properties. Our technique is based on the extraction of strain and chemical sensitive contrast from a single three-beam TEM lattice fringe image by subsequent decomposition into 220 and 020 two-beam fringe images, being …
Authors
Müller K; Schowalter M; Rosenauer A; Hu D; Schaadt DM; Hetterich M; Gilet P; Rubel O; Fritz R; Volz K
Journal
Physical Review B, Vol. 84, No. 4,
Publisher
American Physical Society (APS)
Publication Date
July 15, 2011
DOI
10.1103/physrevb.84.045316
ISSN
2469-9950