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Evaluation of Titanium Direct Bonding Mechanism
Journal article

Evaluation of Titanium Direct Bonding Mechanism

Abstract

Direct metal bonding represents an advanced joining technology that allows vertical stacking with electrical conduction and even heat dissipation. For most metals used as bonding layers, direct bonding when operating under ambient conditions involves metal oxides. The bonding interface saddles with a trapped oxide layer that might affect electrical conduction and even complete sealing of bonding interface. Titanium especially because of its …

Authors

Baudin F; Delaye V; Guedj C; Chevalier N; Mariolle D; Imbert B; Fabbri JM; Di Cioccio L; Bréchet Y

Journal

ECS Journal of Solid State Science and Technology, Vol. 2, No. 5, pp. n115–n119

Publisher

The Electrochemical Society

Publication Date

2013

DOI

10.1149/2.015305jss

ISSN

2162-8769