Journal article
Passivation of GaAs by octadecanethiol self-assembled monolayers deposited from liquid and vapor phases
Abstract
Self-assembled monolayers (SAMs) of octadecanethiol (ODT), CH3(CH2)17SH, were deposited on GaAs (100) substrates from liquid and vapor phases. Liquid-phase-deposited SAMs were prepared by immersing the substrate in a dilute solution of ODT and ethanol, while vapor-phase-deposited monolayers were prepared by exposing the GaAs surface to a stream of ODT vapor in an ultrahigh vacuum environment. The structural and optical properties of the …
Authors
Budz HA; Biesinger MC; LaPierre RR
Journal
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena, Vol. 27, No. 2, pp. 637–648
Publisher
American Vacuum Society
Publication Date
March 1, 2009
DOI
10.1116/1.3100266
ISSN
2166-2746