X-ray photoelectron spectroscopic study of the formation of catalytic gold nanoparticles on ultraviolet-ozone oxidized GaAs(100) substrates

A comprehensive study of the oxide formed on GaAs by exposure to ultraviolet light and ozone (UV-ozone), and the evolution of Au nanoparticles on UV-ozone treated GaAs(100) substrates, has been carried out using x-ray photoelectron spectroscopy. The UV-ozone oxide has been found to consist of oxides of gallium and arsenic in addition to having a significant contribution from elemental arsenic concentrated mostly at the substrate-oxide …