Journal article
X-ray emission from femtosecond laser micromachining
Abstract
Abstract. We characterize the spectral properties of X-rays generated from selected metal and semiconductor targets when 120-fs laser pulses are focused to intensities of∼1014–3×1015 W/cm2 during laser micromachining in air. High fluxes of multi-keV-energy X-rays could be obtained with 280-μJ pulses at a 1 kHz repetition rate. The yield and spectral composition of the X-rays are found to depend sensitively on the processing conditions, and thus …
Authors
Thogersen J; Borowiec A; Haugen HK; McNeill FE; Stronach IM
Journal
Applied Physics A, Vol. 73, No. 3, pp. 361–363
Publisher
Springer Nature
Publication Date
September 2001
DOI
10.1007/s003390100741
ISSN
0947-8396