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Laser ablation as a processing technique for...
Journal article

Laser ablation as a processing technique for metallic and polymer layered structures

Abstract

A study of the laser ablation process for application in processing metallic and polymer layered structures is presented. The central result of this study is that, by operating with laser pulses of different fluences, it is possible to selectively remove polymer overlayers on metallic films and metallic films from polymer layers, provided the metallic films are sufficiently thin. Careful choice of the fluence allowed both of these processes to …

Authors

Guzzo EE; Preston JS

Journal

IEEE Transactions on Semiconductor Manufacturing, Vol. 7, No. 1, pp. 73–78

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Publication Date

1994

DOI

10.1109/66.286834

ISSN

0894-6507