Journal article
Laser ablation as a processing technique for metallic and polymer layered structures
Abstract
A study of the laser ablation process for application in processing metallic and polymer layered structures is presented. The central result of this study is that, by operating with laser pulses of different fluences, it is possible to selectively remove polymer overlayers on metallic films and metallic films from polymer layers, provided the metallic films are sufficiently thin. Careful choice of the fluence allowed both of these processes to …
Authors
Guzzo EE; Preston JS
Journal
IEEE Transactions on Semiconductor Manufacturing, Vol. 7, No. 1, pp. 73–78
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date
1994
DOI
10.1109/66.286834
ISSN
0894-6507