Integrated TiO_2 resonators for visible photonics Academic Article uri icon

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abstract

  • We demonstrate waveguide-coupled titanium dioxide (TiO(2) racetrack resonators with loaded quality factors of 2.2×10(4) for the visible wavelengths. The structures were fabricated in sputtered TiO(2) thin films on oxidized silicon substrates using standard top-down nanofabrication techniques, and passively probed in transmission measurements using a tunable red laser.

authors

  • Choy, Jennifer T
  • Bradley, Jonathan
  • Deotare, Parag B
  • Burgess, Ian B
  • Evans, Christopher C
  • Mazur, Eric
  • Lončar, Marko

publication date

  • February 15, 2012