Journal article
Zone plate focused soft X-ray lithography
Abstract
The zone plate focused soft X-rays of a scanning transmission X-ray microscope have been used to pattern poly(methyl methacrylate) and poly(dimethylglutarimide) films by a direct write method which is analogous to lithography with a focused electron beam. The lithographic characteristics of both polymers have been determined for 300 eV X-rays. With low doses (1 MGy), developed lines 40±5 nm wide were created in poly(methyl methacrylate). At …
Authors
Leontowich AFG; Hitchcock AP
Journal
Applied Physics A, Vol. 103, No. 1, pp. 1–11
Publisher
Springer Nature
Publication Date
4 2011
DOI
10.1007/s00339-010-6172-4
ISSN
0947-8396