Fabrication of sealed nanofluidic channels using site-selective direct write (maskless) X-ray lithography

Sealed nanofluidic channels with cross-sections as small as 60 nm × 60 nm were created in polymer bilayers using the focused X-rays of a scanning transmission X-ray microscope. These structures were then characterized by near-edge X-ray absorption fine structure spectromicroscopy, atomic force microscopy and scanning electron microscopy. The cross-sectional area of the nanochannels could be tuned by adjusting the area patterned in x and y and/or manipulating the bottom layer thickness. The maximum length was found to be limited by the efficiency of excavation of patterned material out of the channel, and the stability of the polymer overlayer which seals the channel. Schemes toward interfacing these nanochannels with conventional microfluidics are discussed.